Do you have an example demonstrating the procedure for performing a large deflection prestressed modal analysis that uses the final prestressed and deformed state resulting from a coupled electrostatic-structural analysis?

Please see the attached test model that performs the coupled electrostatic-structural analysis using the single-code Multi-field solver (MFS).

The final deformed and prestressed state achieved with this coupled-field simulation was then used to perform the large-deflection prestressed modal analysis. All steps to the procedure are included in a single well-documented input file. The model runs in about 2-3 minutes.

For this wide parallel plate, small gap configuration, field fringing is negligible, so TRANS126 could instead be used with a correspondingly negligible loss in accuracy. The TRANS126 modeling approach would be easier than using MFS. The TRANS126 elements can be created conveniently with the EMTGEN command. The TRANS126 approach was used in the MEMS filter example attached to Onyx 545817.

For more general shapes in which field fringing is significant, the MFS approach used in the attached input file would be more accurate than TRANS126.

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